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HomeMicroscopesUpright material science microscopes Axio Imager Vario

Axio Imager Vario

Upright Microscope for Large Samples

Examine large samples – automated and clean room compatible

Analyze smallest MEMS sensors up to XXL wafer or even entire flat planel panel displays without destroying them. Thanks to the sample height of up to 254 mm and lateral space of up to 300 mm you examine the broadest range of samples with Axio Imager Vario. The column design offers high stability. Take control of your wafer in the clean room. A motorized z-drive in addition with the hardware auto focus ensure the automatic setting of the optimum focus position.

Clean Room
The production of semiconductors and inspection of wafers you proceed in clean rooms. Clean rooms are classified according to DIN EN ISO 14644-1, differentiating by number and size of particles per m³. Axio Imager Vario is certified according to this standard and meets the requirements of clean room class 5. Clean room class ISO 5 is equivalent to class 100 of the former standard FED STD 209E (1992). Use the clean room kit, containing a 7x nosepiece turret, particle protection and sneeze guard.

Manufacturer

Zeiss

Testing

Micro

 
  • Description
  • Reviews (0)
Description
axio-imager-vario_cleanroom_system.ts-1535460862308

Highlights

  • Profit from the maximum sample height up to 254 mm and lateral sample space up to 300 mm x 300 mm. Choose between two manual and one motorized column with industry compliant 3-button-operation.
  • Axio Imager Vario focuses with the nosepiece on the sample. That means that you can achieve high focusing accuracy and repeatability, especially with heavy samples.
  • With the Hardware Auto Focus you profit from precise, fast focusing of reflective samples, which are poor in contrast.
  • With Axio Imager Vario in combination with LSM 700 you analyze sensitive samples in high resolution without contact.
  • Axio Imager Vario is certified according to DIN EN ISO 14644-1 and meets the requirements of clean room class 5.

axio-imagervario-intelligent.ts-1535461997825

Hardware Auto Focus

Combine your Axio Imager Vario with Hardware Auto Focus and profit from precise, fast focusing of reflective samples with a lock-in range of up to 12000 µm. You work with a focus system offering a high precision of 0.3 depth of focus of the objective. Use the auto focus for your applications in reflected light and transmitted light, in brightfield, darkfield, polarization contrast, differential interference contrast and oblique illumination.

Applications

Wafer, Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95
Wafer, Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95

 

Wood, Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30
Wood, Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30
Circuit Board, Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13
Circuit Board, Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13
Monocrystalline Silicon Solar Cell, Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95
Monocrystalline Silicon Solar Cell, Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95
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Category: Upright material science microscopes
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VIET NAM INTELLIGENT SERVICE AUTOMATION SOLUTIONS COMPANY LIMITED.

(VISAS CO., LTD)

HCM Office: 5th Floor, TTM Building, No. 309 Bach Dang, Ward 15, Binh Thanh District, Ho Chi Minh City, Vietnam.

HN Office: 12/18/221 Trung Kinh Street, Yen Hoa Ward, Cau Giay District, Ha Noi City, Vietnam.

Hotline: +84912311025

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        • Impact testing machineImpact testing machine
        • PlastimeterPlastimeter
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        • Portable metallographic microscopesPortable metallographic microscopes
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        • Network analyzerNetwork analyzer
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        • Video and image analyzerVideo and image analyzer
      • Semiconductor metrology equipmentSemiconductor metrology equipment
      • Environmental test chambersEnvironmental test chambers
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      • Torsion
      • Compression
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      • Micro
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